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ASTM E1127-08

Standard Guide for Depth Profiling in Auger Electron Spectroscopy

STANDARD published on 1.10.2008

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The information about the standard:

Designation standards: ASTM E1127-08
Note: WITHDRAWN
Publication date standards: 1.10.2008
The number of pages: 5
Approximate weight : 15 g (0.03 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM E1127-08 :

Keywords:
angle lapping, angle-resolved AES, Auger electron spectroscopy, ball cratering, compositional depth profiling, cross sectioning, depth profiling, depth resolution, sputter depth profiling, sputtering, thin films, Surface analysis--spectrochemical analysis, Angle lapping and staining technique, Argon atmospheres, Auger electron spectroscopy (AES), Ball cratering, Crater edge profiling, Depth profiling, Gases, Ion sputtering, Noble gas ions, Nondestructive evaluation (NDE), Polishing properties