ASTM F1367-98(2011)

Standard Specification for Chromium Sputtering Targets for Thin Film Applications (Withdrawn 2020)

STANDARD published on 1.6.2011

English -
PDF - Immediate download (73.00 USD)

The information about the standard:

Designation standards: ASTM F1367-98(2011)
Note: WITHDRAWN
Publication date standards: 1.6.2011
The number of pages: 2
Approximate weight : 6 g (0.01 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM F1367-98(2011) :

Keywords:
chromium, sputtering, targets, Chromium electronic materials/applications, Chromium sputtering targets, Electronic materials/applications--specifications, Sputtering process/targets--specifications, Targets, ICS Number Code 25.220.40 (Metallic coatings)