ASTM F388-84

Method for Measurement of Oxide Thickness on Silicon Wafers and Metallization Thickness by Multiple-Beam Interference (Tolansky Method) (Withdrawn 1993)

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The information about the standard:

Designation standards: ASTM F388-84
Note: WITHDRAWN
The number of pages: 6
Approximate weight : 18 g (0.04 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM F388-84 :

Keywords:
ICS Number Code 29.045 (Semiconducting materials)