ASTM F576-01

Standard Test Method for Measurement of Insulator Thickness and Refractive Index on Silicon Substrates by Ellipsometry (Withdrawn 2003)

STANDARD published on 10.6.2001

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The information about the standard:

Designation standards: ASTM F576-01
Note: WITHDRAWN
Publication date standards: 10.6.2001
The number of pages: 9
Approximate weight : 27 g (0.06 lbs)
Country: American technical standard
Category: Technical standards ASTM

Annotation of standard text ASTM F576-01 :

Keywords:
dielectric thickness, ellipsometry, index of refraction, insulator thickness, refractive index, silicon dioxide, ICS Number Code 29.045 (Semiconducting materials)