State sysem for ensuring the uniformity of measurements. Radiometers of ultraviolet radiation measurements for photolithography technological processes testing. Verification methods
STANDARD published on 1.1.2009
Designation standards: GOST R 8.640-2008
Publication date standards: 1.1.2009
The number of pages: 14
Approximate weight : 42 g (0.09 lbs)
Country: Russian technical standard
Category: Technical standards GOST