VDI/VDE 2655Blatt1.3

Optical metrology of microtopographies - Calibration of interferometers and interference microscopes for form measurement.

STANDARD published on 1.2.2020

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The information about the standard:

Designation standards: VDI/VDE 2655Blatt1.3
Publication date standards: 1.2.2020
The number of pages: 50
Approximate weight : 150 g (0.33 lbs)
Country: German technical standard
Category: Technical standards VDI

Annotation of standard text VDI/VDE 2655Blatt1.3 :

Optische Messtechnik an Mikrotopografien - Kalibrieren von flächenhaft messenden Interferometern und Interferenzmikroskopen für die Formmessung.