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Standard Specification for Chromium Sputtering Targets for Thin Film Applications
STANDARD published on 10.8.1998
Designation standards: ASTM F1367-98
Note: WITHDRAWN
Publication date standards: 10.8.1998
SKU: NS-50056
The number of pages: 2
Approximate weight : 6 g (0.01 lbs)
Country: American technical standard
Category: Technical standards ASTM
Keywords:
Chromium, Chromium sputtering targets, Sputtering, Targets, chromium sputtering targets for thin film applications, test, ICS Number Code 25.220.40 (Metallic coatings)
1. Scope | ||
1.1 This specification covers sputtering targets fabricated from chromium metal. 1.2 This specification sets purity grade levels, physical attributes, analytical methods and packaging requirements. 1.3 The values stated in SI units are regarded as standard. |
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2. Referenced Documents | ||
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