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  4. Standard "ASTM F1367-98(2011)"
WITHDRAWN ASTM F1367-98(2011) 1.6.2011 preview

Additional information

ASTM F1367-98(2011)

Standard Specification for Chromium Sputtering Targets for Thin Film Applications (Withdrawn 2020)

Automatically translated name:

Standard Specification for Chromium Sputtering Targets for Thin Film Applications



STANDARD published on 1.6.2011


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The information about the standard:

Designation standards: ASTM F1367-98(2011)
Note: WITHDRAWN
Publication date standards: 1.6.2011
SKU: NS-50055
The number of pages: 2
Approximate weight : 6 g (0.01 lbs)
Country: American technical standard
Category: Technical standards ASTM

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The category - similar standards:

Metallic coatings

Annotation of standard text ASTM F1367-98(2011) :

Keywords:

chromium, sputtering, targets, Chromium electronic materials/applications, Chromium sputtering targets, Electronic materials/applications--specifications, Sputtering process/targets--specifications, Targets, ICS Number Code 25.220.40 (Metallic coatings)

Additional information

 
1. Scope

1.1 This specification covers sputtering targets fabricated from chromium metal.

1.2 This specification sets purity grade levels, physical attributes, analytical methods and packaging requirements.

1.3 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.
 
2. Referenced Documents

E112-13(2021)

Standard Test Methods for Determining Average Grain Size

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