We need your consent to use the individual data so that you can see information about your interests, among other things. Click "OK" to give your consent.
Standard Test Method for Determination of Total Hydrocarbon Contribution by Gas Distribution System Components
STANDARD published on 1.1.2005
Designation standards: ASTM F1398-93(2005)
Note: WITHDRAWN
Publication date standards: 1.1.2005
SKU: NS-50152
The number of pages: 10
Approximate weight : 30 g (0.07 lbs)
Country: American technical standard
Category: Technical standards ASTM
Keywords:
Argon, Condensable hydrocarbons, Contamination, Flame ionization detectors (FID), Flow and flow rate-semiconductor applications, Gas distribution systems, Hydrocarbons, Instrumental measurement, Mass flow controller (MFC), Methane (CH[inf]4[reset]) equivalent, Minimum detection limit (MDL), Nitrogen, Noncondensable hydrocarbons, Semiconductor clean rooms, Spectrometry-mass, Spool piece, Stainless steel-gas distribution systems, Total hydrocarbons (THC)
Significance and Use |
The purpose of this test method is to define a procedure for testing components being considered for installation into a high-purity gas distribution system. Application of this test method is expected to yield comparable data among components tested for purposes of qualification for this installation. |
1. Scope |
1.1 This test method covers the testing of components for total hydrocarbons (THC) contribution to a gas distribution system at ambient temperature. In addition, this test method allows testing of the component at elevated ambient temperatures as high as 70°C. 1.2 This test method applies to in-line components containing electronics grade materials in the gaseous form, such as those used in semiconductor gas distribution systems. 1.3 Limitations: 1.3.1 This test method is limited by the sensitivity of current instrumentation, as well as by the response time of the instrumentation. This test method is not intended to be used for components larger than 12.7-mm ( 1/2-in.) outside diameter nominal size. This test method could be applied to larger components; however, the stated volumetric flow rate may not provide adequate mixing to ensure a representative sample. Higher flow rates may improve the mixing but excessively dilute the sample. 1.3.2 Different instrumental methods (such as flame ionization detector (FID), mass spectrometer (MS)) will yield total hydrocarbon (THC) levels that are not comparable due to different sensitivities to different molecular species. Hydrocarbon contaminants of high-purity gas distribution systems can be subdivided into two general categories: (1) noncondensable hydrocarbons (<C4), that are present due to difficulty of removal and relative atmospheric abundance, and (2) condensable hydrocarbons, that are often left behind on component surfaces as residues. Condensable hydrocarbons include pump oils, degreasing agents, and polishing compound vehicles. 1.3.3 Because of the tremendous disparity of hydrocarbon species, it is suggested that direct comparisons be made only among data gathered using the same detection method. 1.3.4 This test method is intended for use by operators who understand the use of the apparatus at a level equivalent to six months of experience. 1.4 The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only. 1.5 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 6. |
Do you want to make sure you use only the valid technical standards?
We can offer you a solution which will provide you a monthly overview concerning the updating of standards which you use.
Would you like to know more? Look at this page.
Latest update: 2024-09-28 (Number of items: 2 350 600)
© Copyright 2024 NORMSERVIS s.r.o.