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Standard Test Method for Sizing and Counting Airborne Particulate Contamination in Cleanrooms and Other Dust-Controlled Areas
STANDARD published on 1.4.2009
Designation standards: ASTM F25/F25M-09
Note: WITHDRAWN
Publication date standards: 1.4.2009
SKU: NS-54001
The number of pages: 8
Approximate weight : 24 g (0.05 lbs)
Country: American technical standard
Category: Technical standards ASTM
Keywords:
airborne particle concentration, cleanroom, contamination, macroparticle, Dust-controlled areas, Electron tubes, Microscopic examination--electronic materials, Particulate contamination (aerospace environments), Semiconductor clean rooms, ICS Number Code 13.040.30 (Workplace atmospheres)
1. Scope | ||||||||
1.1 This test method covers counting and sizing airborne particulate matter 5 µm and larger (macroparticles). The sampling areas are specifically those with contamination levels typical of cleanrooms and dust-controlled areas. 1.2 The values stated in either SI units or inch-pound units are to be regarded separately as standard. The values stated in each system may not be exact equivalents; therefore, each system shall be used independently of the other. Combining values from the two systems may result in non-conformance with the standard. 1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory requirements prior to use. |
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2. Referenced Documents | ||||||||
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