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  4. Standard "ASTM F388-84"
WITHDRAWN ASTM F388-84 1.1.1900 preview

ASTM F388-84

Method for Measurement of Oxide Thickness on Silicon Wafers and Metallization Thickness by Multiple-Beam Interference (Tolansky Method) (Withdrawn 1993)




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The information about the standard:

Designation standards: ASTM F388-84
Note: WITHDRAWN
SKU: NS-55128
The number of pages: 6
Approximate weight : 18 g (0.04 lbs)
Country: American technical standard
Category: Technical standards ASTM

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Annotation of standard text ASTM F388-84 :

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ICS Number Code 29.045 (Semiconducting materials)

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