We need your consent to use the individual data so that you can see information about your interests, among other things. Click "OK" to give your consent.
Standard Test Method for Thickness of Heteroepitaxial or Polysilicon Layers (Withdrawn 2002) (Includes all amendments And changes 2/18/2021).
Automatically translated name:
Standard Test Method for Thickness of Heteroepitaxial or Polysilicon Layers (Withdrawn 2002)
STANDARD published on 10.12.2000
Designation standards: ASTM F399-00a
Note: WITHDRAWN
Publication date standards: 10.12.2000
SKU: NS-55151
The number of pages: 4
Approximate weight : 12 g (0.03 lbs)
Country: American technical standard
Category: Technical standards ASTM
Keywords:
epi, epitaxial, layer thickness, poly, polysilicon, profilometer, step height, ICS Number Code 29.045 (Semiconducting materials)
1. Scope |
This standard was transferred to SEMI (www.semi.org) May 2003 1.1 This test method covers the determination of thickness of silicon heteroepitaxial or polysilicon layers deposited under conditions such that the interface region between the deposited layer and the substrate is less than 20-nm thick. Interface regions 20 nm and thicker rarely occur, but are evidenced by a roughness in the originally smooth substrate which can be detected by a profilometer after the thickness measurement is completed and the layer has been etched away. 1.2 This test method is applicable to layers having a thickness in the range from 0.1 to 20 µm, inclusive. Other thicknesses may be measured by the same technique but the expected precisions have not been determined. 1.3 This test method is applicable to silicon layers deposited on any substrate, such as silicon dioxide, sapphire, spinel, etc., that is not significantly attacked by the recommended etch (see 8.3 and 8.4). 1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 9. |
Do you want to make sure you use only the valid technical standards?
We can offer you a solution which will provide you a monthly overview concerning the updating of standards which you use.
Would you like to know more? Look at this page.
Latest update: 2024-12-23 (Number of items: 2 217 157)
© Copyright 2024 NORMSERVIS s.r.o.