ČSN EN 62047-14 (358775)

Semiconductor devices - Micro-electromechanical devices - Part 14: Forming limit measuring method of metallic film materials



STANDARD published on 1.10.2012


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The information about the standard:

Designation standards: ČSN EN 62047-14
Classification mark: 358775
Catalog number: 91588
Publication date standards: 1.10.2012
SKU: NS-161581
The number of pages: 28
Approximate weight : 84 g (0.19 lbs)
Country: Czech technical standard
Category: Technical standards ČSN

The category - similar standards:

Other semiconductor devices

Annotation of standard text ČSN EN 62047-14 (358775):

Tato norma popisuje definice a postupy pro měření mezní tvářitelnosti kovových materiálů tvořících vrstvu pro tloušťky v rozmezí od 0,5 _m do 300 _m. Kovové vrstvy, které jsou v normě zmiňovány se používají v elektrických částech, MEMS a mikrosoučástkách. Norma uvádí metody předpovídání vad v materiálu při vtiskávacím procesu

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