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ČSN EN ISO 14644-10 (125301)
Cleanrooms and associated controlled environments - Part 10: Assessment of surface cleanliness for chemical contamination
Translate name
STANDARD published on 1.11.2022
The information about the standard:
Designation standards: ČSN EN ISO 14644-10
Classification mark: 125301
Catalog number: 515524
Publication date standards: 1.11.2022
SKU: NS-1088350
The number of pages: 44
Approximate weight : 132 g (0.29 lbs)
Country: Czech technical standard
Category: Technical standards ČSN
The category - similar standards:
Annotation of standard text ČSN EN ISO 14644-10 (125301):
This document establishes appropriate testing processes to determine the cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). This document is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, worksurfaces, tools, equipment and devices. NOTE 1 - For the purpose of this document, consideration is only given to the chemical characteristics of a particle. The physical properties of the particle are not considered and this document does not cover the interaction between the contamination and the surface. NOTE 2 - This document does not include the contamination generation process or any time-dependent influences (e.g. deposition, sedimentation, ageing) or process-dependent activities such as transportation and handling. Neither does it include guidance on statistical quality-control techniques to ensure compliance
Preview of the standard ČSN EN ISO 14644-10 (125301)
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