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Standard DIN 32566:2007-12 1.12.2007 preview

DIN 32566:2007-12

Production equipment for microsystems - Specification for an X-Ray Lithography Mask Support Ring.



STANDARD published on 1.12.2007


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Price61.90 USD excl. VAT
61.90 USD

The information about the standard:

Designation standards: DIN 32566:2007-12
Publication date standards: 1.12.2007
SKU: NS-195653
The number of pages: 9
Approximate weight : 27 g (0.06 lbs)
Country: German technical standard
Category: Technical standards DIN

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The category - similar standards:

Electronic components in generalOptical equipment

Annotation of standard text DIN 32566:2007-12 :

Fertigungsmittel für Mikrosysteme - Spezifikation eines Maskentragrings für die Röntgentiefenlithographie.

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