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Testing of materials for semiconductor technology; determination of impurities in carrier gases and dopant gases; determination of C1-C3-hydrocarbons in nitrogen by gas-chromatography.
STANDARD published on 1.9.1993
Designation standards: DIN 50450-4:1993-09
Publication date standards: 1.9.1993
SKU: NS-203849
The number of pages: 2
Approximate weight : 6 g (0.01 lbs)
Country: German technical standard
Category: Technical standards DIN
Prüfung von Materialien für die Halbleitertechnologie; Bestimmung von Verunreinigungen in Träger- und Dotiergasen; Bestimmung von C1-C3-Kohlenwasserstoffen in Stickstoff mit Gaschromatographie.
WITHDRAWN
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1.4.2003
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1.3.1997
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