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Testing of materials for semiconductor technology - Determination of trace elements in liquids - Part 5: Guideline for the selection of materials and testing of their suitability for apparatus for sampling and sample preparation for the determination of trace elements in the range of micrograms per kilogram and nanograms per kilogram.
STANDARD published on 1.3.2010
Designation standards: DIN 50451-5:2010-03
Note: WITHDRAWN
Publication date standards: 1.3.2010
SKU: NS-203863
The number of pages: 11
Approximate weight : 33 g (0.07 lbs)
Country: German technical standard
Category: Technical standards DIN
Prüfung von Materialien für die Halbleitertechnologie - Bestimmung von Elementspuren in Flüssigkeiten - Teil 5: Leitlinie zur Auswahl von Werkstoffen und Prüfung ihrer Eignung für Geräte zur Probenahme und Probenvorbereitung für die Elementspuren-Bestimmung im Bereich von Mikrogramm je Kilogramm und Nanogramm je Kilogramm.
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