E DIN EN 62047-21:20..
Cookies
We need your consent to use the individual data so that you can see information about your interests, among other things. Click "OK" to give your consent.
DIN EN 62047-12:2012-06
Semiconductor devices - Micro-electromechanical devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures.
STANDARD published on 1.6.2012
The information about the standard:
Designation standards: DIN EN 62047-12:2012-06
Publication date standards: 1.6.2012
SKU: NS-239563
The number of pages: 31
Approximate weight : 93 g (0.21 lbs)
Country: German technical standard
Category: Technical standards DIN
The category - similar standards:
Semiconductor devices in generalElectromechanical components in general
Annotation of standard text DIN EN 62047-12:2012-06 :
Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 12: Verfahren zur Prüfung der Biege-Ermüdungsfestigkeit von Dünnschichtwerkstoffen unter Verwendung der Resonanzschwingungen bei MEMS-Strukturen.
Similar standards:
WITHDRAWN
1.11.2012
WITHDRAWN
1.11.2012
WITHDRAWN
1.5.2014
WITHDRAWN
1.5.2014
1.2.2007
1.3.2011
We recommend:
Updating of laws
Do you want to be sure about the validity of used regulations?
We offer you a solution so that you could use valid and updated legislative regulations.
Would you like to get more information? Look at this page.
