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Semiconductor devices - Micro-electromechanical devices - Part 2: Tensile testing method of thin film materials.
STANDARD published on 1.2.2007
Designation standards: DIN EN 62047-2:2007-02
Publication date standards: 1.2.2007
SKU: NS-239568
The number of pages: 14
Approximate weight : 42 g (0.09 lbs)
Country: German technical standard
Category: Technical standards DIN
Semiconductor devices in generalElectromechanical components in general
Halbleiterbauelemente - Bauteile der Mikrosystemtechnik - Teil 2: Prüfverfahren zur Zugbeanspruchung bei Dünnschicht-Werkstoffen.
1.2.2008
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WITHDRAWN
1.5.2012
WITHDRAWN
1.5.2014
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