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Semiconductor devices - Micro-electromechanical devices - Part 3: Thin film standard test piece for tensile-testing.
STANDARD published on 1.2.2007
Designation standards: DIN EN 62047-3:2007-02
Publication date standards: 1.2.2007
SKU: NS-239569
The number of pages: 9
Approximate weight : 27 g (0.06 lbs)
Country: German technical standard
Category: Technical standards DIN
Semiconductor devices in generalElectromechanical components in general
Halbleiterbauelemente - Bauteile der Mikrosystemtechnik - Teil 3: Dünnschicht-Standardmikroprobe für die Prüfung der Zugbeanspruchung.
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