E DIN EN 62047-20:20..
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DIN EN 62047-4:2011-03
Semiconductor devices - Micro-electromechanical devices - Part 4: Generic specification for MEMS.
STANDARD published on 1.3.2011
The information about the standard:
Designation standards: DIN EN 62047-4:2011-03
Publication date standards: 1.3.2011
SKU: NS-239570
The number of pages: 22
Approximate weight : 66 g (0.15 lbs)
Country: German technical standard
Category: Technical standards DIN
The category - similar standards:
Semiconductor devices in generalElectromechanical components in general
Annotation of standard text DIN EN 62047-4:2011-03 :
Halbleiterbauelemente - Bauteile der Mikrosystemtechnik - Teil 4: Fachgrundspezifikation für Mikrosystemtechnik.
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