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Semiconductor devices - Micro-electromechanical devices - Part 6: Axial fatigue testing methods of thin film materials.
STANDARD published on 1.7.2010
Designation standards: DIN EN 62047-6:2010-07
Publication date standards: 1.7.2010
SKU: NS-239572
The number of pages: 17
Approximate weight : 51 g (0.11 lbs)
Country: German technical standard
Category: Technical standards DIN
Semiconductor devices in generalElectromechanical components in general
Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 6: Prüfverfahren zur uniaxialen Dauerschwingfestigkeit von Dünnschicht-Werkstoffen.
1.12.2003
WITHDRAWN
1.4.2003
1.4.2003
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1.4.2003
WITHDRAWN
1.4.2003
1.7.2004
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