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DIN EN 62047-8:2011-12
Semiconductor devices - Micro-electromechanical devices - Part 8: Strip bending test method for tensile property measurement of thin films.
STANDARD published on 1.12.2011
The information about the standard:
Designation standards: DIN EN 62047-8:2011-12
Publication date standards: 1.12.2011
SKU: NS-239574
The number of pages: 20
Approximate weight : 60 g (0.13 lbs)
Country: German technical standard
Category: Technical standards DIN
The category - similar standards:
Semiconductor devices in generalElectromechanical components in general
Annotation of standard text DIN EN 62047-8:2011-12 :
Halbleiterbauelemente - Bauelemente der Mikrosystemtechnik - Teil 8: Streifen-Biege-Prüfverfahren zur Messung von Zugbeanspruchungsmerkmalen dünner Schichten.
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