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IEC 62047-4-ed.1.0
Semiconductor devices - Micro-electromechanical devices - Part 4: Generic specification for MEMS
STANDARD published on 21.8.2008
The information about the standard:
Designation standards: IEC 62047-4-ed.1.0
Publication date standards: 21.8.2008
SKU: NS-414110
The number of pages: 38
Approximate weight : 114 g (0.25 lbs)
Country: International technical standard
Category: Technical standards IEC
The category - similar standards:
Annotation of standard text IEC 62047-4-ed.1.0 :
IEC 62047-4:2008 describes the generic specifications for micro-electromechanical systems (MEMS) made by semiconductors, which are the basis for specifications given in other parts of this series for various types of MEMS applications such as sensors, RF MEMS, excluding optical MEMS, bio MEMS, micro TAS, and power MEMS. This standard specifies general procedures for quality assessment to be used in IECQ-CECC systems and establishes general principles for describing and testing of electrical, optical, mechanical and environmental characteristics. IEC 62047-4:2008 aids in the preparation of standards that define devices and systems made by micromachining technology, including but not limited to, material characterization and handling, assembly and testing, process control and measuring methods. MEMS described in this standard are basically made of semiconductor material. However, the statements made in this standard are also applicable to MEMS using materials other than semiconductor, for example, polymers, glass, metals and ceramic materials. La CEI 62047-4:2008 decrit des specifications generiques pour les systemes electromecaniques microminiaturises (MEMS, Micro-Electro Mechanical Systems) faits a partir de semi-conducteurs, constituant la base des specifications presentees dans dautres parties de cette serie pour differents types dapplications basees sur des MEMS, telles que des capteurs et les MEMS-RF, a lexclusion des MEMS optiques, des bio-MEMS, des micro-TAS et des MEMS de puissance. Cette norme specifie les procedures generales devaluation de la qualite a utiliser dans le systeme IECQ-CECC et etablit les principes generaux necessaires pour decrire et tester les caracteristiques electriques, optiques, mecaniques et environnementales. La CEI 62047-4:2008 contribue a la preparation de normes servant a definir des dispositifs et des systemes fabriques par des techniques de micro-usinage, incluant, mais sans sy limiter, la caracterisation et la manipulation des materiaux, lassemblage et les essais, les methodes de mesure et de commande de processus. Les MEMS decrits dans cette norme sont essentiellement constitues de materiaux semi-conducteurs. Toutefois, les declarations faites dans cette norme peuvent egalement etre appliquees aux MEMS utilisant des materiaux autres que des semi-conducteurs, par exemple, des polymeres, du verre, des metaux et des materiaux en ceramiques.
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