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Gas cylinders - Gas cylinder valve connections for use in the microelectronics industry - Part 1: Outlet connections (ISO 10692-1:2001)
Translate name
STANDARD published on 1.8.2003
Designation standards: ÖNORM EN ISO 10692-1
Publication date standards: 1.8.2003
SKU: NS-773203
The number of pages: 24
Approximate weight : 72 g (0.16 lbs)
Country: Austrian technische Norm
Category: Technical standards ÖNORM
Festgelegt sind die besonderen Anforderungen an Seitenanschlüsse von Gasflaschenventilen für Gase und Gasgemische hinsichtlich Reinheitsgrad und Partikelfreiheit bei der Herstellung von Komponenten für die Mikroelektronik. Weiters sind Bestimmungen hinsichtlich Leckraten für den Betrieb enthalten.
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Latest update: 2024-09-08 (Number of items: 2 346 217)
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