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Standard Guide for Reporting of Ion Beam Parameters Used in Surface Analysis
STANDARD published on 10.4.2000
Designation standards: ASTM E1577-95(2000)
Note: WITHDRAWN
Publication date standards: 10.4.2000
SKU: NS-42244
The number of pages: 2
Approximate weight : 6 g (0.01 lbs)
Country: American technical standard
Category: Technical standards ASTM
Keywords:
ion beam sputtering, surface analysis, ICS Number Code 17.040.20 (Properties of surfaces)
1. Scope | ||||
1.1 This guide covers the information needed to characterize ion beams used in surface analysis. 1.2 This guide does not cover all information required to perform a sputter depth profile (see referenced documents), specify any properties of the specimen except its surface normal, and discuss the rationale for choosing a particular set of ion beam parameters (1). This guide does assume that the ion flux has a unique direction, that is, is an ion beam, rather than a wide spectrum of velocity vectors more typical of a plasma. 1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. |
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2. Referenced Documents | ||||
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