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Standard Guide for Performing Sputter Crater Depth Measurements
STANDARD published on 10.4.2002
Designation standards: ASTM E1634-02
Note: WITHDRAWN
Publication date standards: 10.4.2002
SKU: NS-42451
The number of pages: 3
Approximate weight : 9 g (0.02 lbs)
Country: American technical standard
Category: Technical standards ASTM
Keywords:
Auger electron spectroscopy, secondary ion mass spectrometry, stylus profilometry, surface analysis , x-ray photoelectron spectroscopy, ICS Number Code 71.040.50 (Physicochemical methods of analysis)
1. Scope | ||
1.1 This guide covers the preferred procedure for acquiring and post-processing of sputter crater depth measurements. This guide is limited to stylus-type surface profilometers equipped with a stage, stylus, associated scan and sensing electronics, video system for sample and scan alignment, and computerized system. 1.2 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. |
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2. Referenced Documents | ||
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