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Testing of materials for semiconductor technology; determination of impurities in carrier gases and doping gases; determination of oxygen impurity in N2, Ar, He, Ne and H2 by using a galvanic cell.
STANDARD published on 1.3.1991
Designation standards: DIN 50450-2:1991-03
Publication date standards: 1.3.1991
SKU: NS-203847
The number of pages: 2
Approximate weight : 6 g (0.01 lbs)
Country: German technical standard
Category: Technical standards DIN
Prüfung von Materialien für die Halbleitertechnologie; Bestimmung von Verunreinigungen in Träger- und Dotiergasen; Bestimmung der Sauerstoffverunreinigung in Stickstoff, Argon, Helium, Neon und Wasserstoff mittels einer galvanischen Meßzelle.
WITHDRAWN
1.3.1991
1.9.1993
WITHDRAWN
1.4.2003
WITHDRAWN
1.3.1997
WITHDRAWN
1.9.1983
WITHDRAWN
1.9.1983
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