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Standard Guide for Depth Profiling in Auger Electron Spectroscopy
STANDARD published on 10.9.1997
Designation standards: ASTM E1127-91(1997)
Note: WITHDRAWN
Publication date standards: 10.9.1997
SKU: NS-40555
The number of pages: 4
Approximate weight : 12 g (0.03 lbs)
Country: American technical standard
Category: Technical standards ASTM
Keywords:
Angle lapping, Argon atmospheres, Ball cratering, Crater edge profiling, Depth profiling, Gases, Ion sputtering, Noble gas ions, Nondestructive evaluation (NDE), Polishing properties, Spectroscopy-auger electron (AES), Sputter depth profiling data, Surface analysis-spectrochemical analysis, Xenon, ICS Number Code 71.040.50 (Physicochemical methods of analysis)
1. Scope | ||||||||||||||||||||
1.1 This guide covers procedures used for depth profiling in Auger electron spectroscopy. 1.2 Guidelines are given for depth profiling by the following: Section Ion Sputtering 6 Angle Lapping and Cross-Sectioning 7 Mechanical Cratering 8 Nondestructive Depth Profiling 91.3 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use. |
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