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Semiconductor devices - Part 1: Time-dependent dielectric breakdown (TDDB) test for inter-metal layers
STANDARD published on 1.7.2011
Designation standards: ČSN EN 62374-1
Classification mark: 358768
Catalog number: 88688
Publication date standards: 1.7.2011
SKU: NS-162086
The number of pages: 28
Approximate weight : 84 g (0.19 lbs)
Country: Czech technical standard
Category: Technical standards ČSN
Tato norma popisuje zkušební metodu, zkušební strukturu a metodu pro odhad životnosti pro zkoušku časově závislého dielektrického průrazu (TDDB) pro intermetalické vrstvy vytvořené pro polovodičové součástky
1.12.2003
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1.4.2003
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