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ČSN EN 62047-21 (358775)
Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson´s ratio of thin film MEMS materials
Automatically translated name:
Semiconductor devices - Microelectromechanical devices - Part 21: Test method for Poisson's ratio of thin film materials, MEMS. ( In English , the text is part of a copy ).
STANDARD published on 1.4.2015
The information about the standard:
Designation standards: ČSN EN 62047-21
Classification mark: 358775
Catalog number: 97102
Publication date standards: 1.4.2015
SKU: NS-583615
The number of pages: 24
Approximate weight : 72 g (0.16 lbs)
Country: Czech technical standard
Category: Technical standards ČSN
The category - similar standards:
Semiconductor devices in generalElectromechanical components in general
Annotation of standard text ČSN EN 62047-21 (358775):
Tato norma definuje stanovení Poissonova poměru z výsledků měření, které jsou získány pomocí zatěžování tenkovrstvých mikroelektromechanických systémů (MEMS) v jedné, nebo dvou osách. Jedná se o vzorky, které mají délku a šířku menší jak 10 mm a tloušťku menší jak 10 _m
Preview of the standard ČSN EN 62047-21 (358775)
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