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IEC 62047-3-ed.1.0
Semiconductor devices - Micro-electromechanical devices - Part 3: Thin film standard test piece for tensile testing
STANDARD published on 15.8.2006
The information about the standard:
Designation standards: IEC 62047-3-ed.1.0
Publication date standards: 15.8.2006
SKU: NS-414109
The number of pages: 15
Approximate weight : 45 g (0.10 lbs)
Country: International technical standard
Category: Technical standards IEC
The category - similar standards:
Annotation of standard text IEC 62047-3-ed.1.0 :
Specifies a standard test piece, which is used to guarantee the propriety and accuracy of a tensile testing system for thin film materials with length and width under 1 mm and thickness under 10 m, which are main structural materials for microelectromechanical systems (MEMS), micromachines and similar devices. It is based on such a concept that a tensile testing system can be guaranteed in propriety and accuracy, when the measured tensile strengths of the standard test pieces, whose tensile strength is pre-determined, are within the designated range. It also specifies the test pieces to minimize characteristics deviation among the pieces. Cette norme internationale specifie une eprouvette d fessai normalisee, qui est utilisee pour garantir le bien-fonde et la precision du systeme d fessais de traction pour les materiaux en couche mince avec une longueur et une largeur inferieures a 1 mm et une epaisseur inferieure a 10 Em, et qui sont des materiaux de structure principaux pour les systemes microelectromecaniques (MEMS), les micromachines et dispositifs analogues. Cette norme internationale repose sur un concept tel qu fun systeme d fessais de traction puisse etre garanti du point de vue du bien-fonde et de la precision, lorsque les resistances a la traction mesurees des eprouvettes d fessai normalisees, dont la resistance a la traction est predeterminee, se situent dans la plage designee. Elle specifie egalement les eprouvettes d fessai pour minimiser les ecarts de caracteristiques parmi les eprouvettes.
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